Dry Vacuum Pumps use in Semiconductor Industry, Dry mechanical vacuum pumps (referred to as “dry vacuum pumps”) are defined as vacuum pumps capable of starting suction from atmospheric pressure and discharging directly into the atmosphere. These pumps operate without oil or other working mediums inside the pump chamber, achieving ultimate pressures comparable to those of oil-sealed vacuum pumps.

The development of vacuum pumps has increasingly been influenced by the demands of vacuum application environments. Modern industries and high-tech manufacturing processes require vacuum systems capable of handling corrosive gases, dust particles, toxic gases, and oil-free operations. Traditional oil-sealed vacuum pump systems often fail to meet these demands. As a result, dry vacuum pumps, with their wide pumping speed range, oil-free chambers, low energy consumption, corrosion resistance, and other advantages, have become widely adopted. They are now the preferred vacuum acquisition equipment in industries such as microelectronics, semiconductors, precision machining, and renewable energy equipment.

Key Application Areas

Dry vacuum pumps are increasingly essential in:

1. Graphene materials and application technology
2. High-performance carbon fiber and composites
3. All-solid-state laser technology
4. High-temperature alloys and manufacturing technologies
5. Semiconductor chips and efficient energy conversion and storage
6. Solar energy utilization and application materials
7. Novel functional and intelligent materials (e.g., vacuum coating technology)

These fields require a substantial amount of vacuum acquisition equipment, particularly clean, oil-free dry vacuum pumps.

Applications in Semiconductor Manufacturing

The semiconductor manufacturing process consists of multiple steps, including wafer processing, oxidation, lithography, etching, thin-film deposition, interconnection, testing, and packaging. Most of these processes require an oil-free vacuum environment.

Dry Vacuum Pumps use in Semiconductor Production

1. Load Lock (L/L) Chamber Vacuuming
   • Challenges include withstanding high-frequency atmospheric shocks and meeting large-scale manufacturing requirements, such as energy and space savings.
   • Multistage roots pumps are commonly used due to their compact size, cost efficiency, and energy savings. For larger L/L chambers, a roots + screw pump system is preferred.
2. Process Chamber Vacuuming
   • Pre-Vacuuming Stage: High pumping speeds from high to low pressures, with enhanced energy-saving capabilities. Multistage roots pumps excel in efficiency but are complex in structure.
   • Processing Stage: Handles corrosive gases (e.g., in etching processes) and particulate matter. Pumps must resist corrosion, process byproducts, and operate with high thermal stability. Claw-type dry pumps are highly adaptable, particularly in etching processes.

Applications in Key Semiconductor Processes

1. Wafer Manufacturing
   • Includes single crystal pulling and silicon wafer finishing (grinding machines).
   • Key challenges: Handling fine silicon dust and argon gas during vacuuming.
   • Preferred configuration: Screw pumps paired with roots pumps for stable operation and manageable maintenance costs.
2. Etching Process
   • Similar to CVD processes but with less intense chemical reactions. Main challenges include handling dust, with process gases being a secondary consideration.
   • Claw pumps or multistage roots pumps are commonly used, with roots + multistage claw pump structures gaining popularity.
3. Thin Film Deposition (CVD)
   • High vacuum levels and efficient dust handling are critical. Roots + claw pumps or screw pumps are used depending on the vacuum requirements.

Recommended Dry Vacuum Pumps

For semiconductor applications, NuoXuTech recommends the following high-performance dry vacuum pumps:

1. Multistage Roots Pumps
   • Excellent in compact design, energy efficiency, and cost-effectiveness for high-volume manufacturing.
2. Claw-Type Dry Pumps
   • Superior for handling particulate matter, corrosive gases, and high-torque operations, particularly in etching processes.
3. Screw Pumps
   • Ideal for pre-vacuuming stages and large chamber applications, offering high efficiency at low vacuum levels.

These pumps ensure optimal performance in semiconductor manufacturing, providing reliable, oil-free operation and long-term stability.

Contact us

For more information about the dry vacuum pumps use in semiconductor industry, contact Nuoxutech at contact@nuoxutech.com or visit our Blogger nuoxutech.blogspot.com .You can also reach us on WhatsApp at +86 13849062209.Our team is ready to provide you with professional service and support.

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