GM series High-vacuum diaphragm valve

GM High vacuum diaphragm valve use valve rod to press rubber film directly on the valve seat, use to cut-off or connect Vacuum system.

GM High Vacuum Diaphragm Valve

GM series High-vacuum diaphragm valve

Product Description:

The GM High Vacuum Diaphragm Valve is designed to cut off or connect the vacuum system by utilizing a valve rod to press a rubber film directly onto the valve seat. It offers reliable performance and precise control in high vacuum applications. The valve is available in different connection forms including lap joint flange connection, fast unload flange connection, and weld type connection (I and II types). It is suitable for use with air and non-corrosive gases.

Basic Dimensions:

 

Applicable Scope(Pa)2×105~1.3×10-4
Valve Leak Rate(Pa.L/S)≤1.3×10-6
Medium Temperature(℃)-25~+80(Seal Material: chemigum)
-30~+150(Seal Material: viton)
Install Positionarbitrary

Connection Forms:

  1. Lap Joint Flange Connection: Allows for secure and leak-tight connection using lap joint flanges.
  2. Fast Unload Flange Connection: Provides quick and easy installation and removal using fast unload flanges.
  3. Weld Type Connection:
    • Weld I Type Connection (Both End Weld): Both ends of the valve are welded to the system, ensuring stability and integrity.
    • Weld II Type Connection (One End Weld, Another End Insert): One end of the valve is welded to the system, while the other end is inserted, offering flexibility in installation.

Applications:

  • Vacuum Systems: Used for cutting off or connecting vacuum systems in various industrial and scientific applications requiring high vacuum levels.
  • Semiconductor Manufacturing: Ideal for semiconductor fabrication processes where precise vacuum control is crucial for ensuring product quality and yield.
  • Thin Film Deposition: Suitable for thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD).
  • Research and Development: Applied in research laboratories and experimental setups for creating controlled vacuum environments.

The GM High Vacuum Diaphragm Valve offers superior performance, leak-tight sealing, and versatile installation options, making it a reliable choice for high vacuum applications across different industries.

GM High Vacuum Diaphragm Valve

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Keywords

vacuum system,nuoxutech, vacuum pump, VacuumSystem, GM series High-vacuum diaphragm valve.

Specification

Applicable range (Pa)105~1.3×10-4
Valve leakage rate (Pa.L/S)≤1.3×10-4
Medium temperature (°C)-25~+80 (the sealing material is NBR) -30~+150 (the sealing material is fluororubber)

Dimension Drawing

GM GM series High-vacuum diaphragm valve

(Pic 1) Loop flange connection and dimensions

modeldiameter(DN)ΦDΦBΦWHLn-ΦCFlange standard
GM-101046365575754-Φ6JB919
GM-25257055901151204-Φ7GB/T6070
GM-4040100801001321504-Φ9
GM-5050110901001571804-Φ9

(Pic 2) Quick release flange (KF) connection and dimensions

modeldiameter(DN)ΦDΦBΦWHLFlange standard
GM-10/KF103012.2557575GB4982
GM-25/KF254026.290115100
GM-40/KF405541.2100132150
GM-50/KF507552.2100157180/

(Pic 3) Welded connection and dimensions

modeldiameter (DN)ΦDΦWHL
GM-10-H(I)10195575150
GM-25-H(I)253290115200
GM-40-H(I)4045100132240
GM-50-H(I)5057100157240
GM-10-H(II)1095575150
GM-25-H(II)251990115200
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